Axcelis Technologies GmbH is a 100% subsidiary of Axcelis Technologies Inc., headquartered in Aschheim-Dornach with an additional office in Dresden. The company sells production equipment for the semiconductor front-end market; its product portfolio includes ion implanters, thermal process systems, plasma ashers and photo stabilizers. The GmbH handles sales, installation, spare parts supply and service/support of equipment during and after the warranty period and since 2015 has offered "all-in" contracts as a service product. Sales are heavily concentrated in Europe; Germany, Italy and France together account for approximately 80% of external revenue.
Herstellung, Vertrieb, Installation und Montage, Wartung und Instandhaltung von, sowie Erbringen von Serviceleistungen für Ionen Implantationsmaschinen und Zubehör sowie ähnlicher Geräte für den Einsatz in der Halbleiterindustrie und verwandter Industrien.
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Source: German Commercial Register (Handelsregister) München Local Court, HRB 131980 (as of 16 October 2026)
Source: German Commercial Register (Handelsregister) München Local Court, HRB 131980 (as of 16 October 2026)
Source: German Commercial Register (Handelsregister) München Local Court, HRB 131980 (as of 16 October 2026)
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Source: German Commercial Register (Handelsregister) München Local Court, HRB 131980 (as of 16 October 2026)
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